A Resonant Siso Sensor Based on a Coupled Array of Microelectromechanical Oscillators

نویسندگان

  • Barry E. DeMartini
  • Jeffrey F. Rhoads
  • Steven W. Shaw
  • Kimberly L. Turner
چکیده

This work details the preliminary development and testing of a novel, single input – single output (SISO) resonant microsensor, which exploits vibration localization in a coupled-oscillator architecture to allow for the detection of multiple analytes with a single platform. The work includes a brief description of a preliminary sensor design and its operating principles, an outline of a lumped mass analog that proves convenient for analysis and predictive design, and preliminary experimental results, recently obtained from a first-generation device, which verify the sensor’s feasibility.

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تاریخ انتشار 2006